Lever amplified PiezoMove^® P-601 actuators combine large vertical travel ranges up to 480 µm and a high positioning accuracy in a very compact design. With settling times of only a view milliseconds and a resolution in the sub-nanometre range they are well suited for static and dynamical applications.

The P-601 lever amplified actuators

PiezoMove^® P-601 lever amplified actuators cover the range between direct-driven preloaded piezo translators, such as the P-840 series, and single-axis nanopositioning stages, like the P-611 series. Compared to direct-driven piezo translators, lever amplified actuators offer larger travel ranges, a much higher lateral stiffness and guiding precision.

Compared to single-axis nanopositioning stages, they offer clearly smaller dimensions. PiezoMove^® lever amplified actuators feature a resolution to 0.2 nm and a repeatability to 8 nm.

With their highly precise, frictionless flexure guidance, a very high stiffness and excellent straightness of motion are reached. Together with their small dimensions and the cost-effective design, the P-601 lever amplified actuators are especially suited for OEM applications. Versions with strain-gauge sensors (SGS) are equipped with a full bridge circuit that is insensitive to thermal drift. Versions without a sensor are also available for open-loop applications. In addition to standard models made from steel special versions from Invar or aluminum, as well as non-magnetic ones are available on request.

Reliability is assured by the use of award-winning PICMA^® multilayer actuators, which are integrated into a sophisticated, single-module, flexure guiding system. The PICMA^® actuators feature cofired ceramic encapsulation and thus offer better performance and reliability than conventional piezo actuators. The wire-EDM-cut flexures are FEA modeled to make them extremely precise. In addition they are maintenance-free and not subject to wear.

Typical applications are in Nanopositioning, Semiconductor Testing, Adaptronics, Photonics/Integrated Optics and Biotechnology.

Powered by Joomla Tags